Release of the New Scanning Electron Microscope JSM-IT500 Series InTouchScope(TM) - Fast and Easy Analysis with Significantly High Throughput -

2017/03/13

JEOL Ltd. (President Gon-emon Kurihara) announces the release of a new scanning electron microscope (SEM), the JSM-IT500 series, to be released in March 2017.

Product development background

Scanning electron microscopes are used in a wide range of fields, such as nanotechnology, metals, semiconductors, ceramics, medicine, and biology. In addition, SEM applications are expanding to not only basic research, but also quality control at manufacturing sites. With this, demands for faster and easier data acquisition of both SEM images and analysis results, such as energy dispersive X-ray spectroscopy (EDS) spectra, are increasing.

Built off of the highly successful and award winning predecessor of our InTouchScope™ series SEMs, the JSM-IT500 series was developed to meet these increasing demands in the market place. The JSM-IT500 series breaks through the conventional general-purpose SEM in terms of throughput, approximately 35% higher than our InTouchScope™ series, enabling significantly faster and easier analyses.

Main Features

  • Integration of SEM and EDS system
    Further integration of SEM and EDS system enables seamless operation form observation to analysis.
  • New "Zeromag" function
    With our Zeromag function, sample navigation is even easier than ever. You can locate areas for imaging or specify analysis positions over multiple fields using an optical image or holder graphic.
  • New "Live Analysis" function
    With our Analytical series (“Live Analysis”), the embedded EDS system shows a real time EDS spectrum during image observation for efficient elemental analysis.
  • "SMILE VIEW™ Lab" for integrated management of image and analysis data
    All data from collected SEM images to elemental analysis results are integrated to facilitate fast report generation.
  • Specimen Exchange Navi
    Guided operation from specimen introduction to image observation.

Main Specifications

JSM-IT500 series can be equipped in the following 4 configurations: BU (Base Unit) / A (Analysis) / LV (Low Vacuum) / LA (Low Vacuum & Analysis)

Resolution HV mode :  3.0 nm (30 kV)  15.0 nm (1.0 kV)
LV mode : 4.0 nm (30 kV with Backscattered electron image)
Direct magnification x 5 to x 300,000
 (Defined with a display size of 128 mm x 96 mm)
Displayed magnification x 14 to x 839,724
(Defined with a display size of 358 mm x 269 mm)
Electron gun Tungsten (W) filament
Accelerating voltage 0.3 kV to 30 kV
Probe current 1 pA to 1 μA
LV pressure adjustment 10 to 650 Pa
Automatic functions Filament adjustment, Gun alignment,
Focus / Stigmator / Brightness / Contrast
Maximum specimen size 200 mm diameter, 90 mm height
Specimen stage Large eucentric type
X: 125 mm  Y: 100 mm  Z: 80 mm  Tilt: -10° to 90°  Rotation: 360°
Standard recipe Built-in (includes EDS conditions)
Image mode Secondary electron image, REF image,
Compositional image, Topographic image, Stereo-microscopic image
EDS functions Spectral analysis, Qualitative & Quantitative analysis,
Line analysis (horizontal line, specific direction line),
Elemental mapping, Probe tracking

JSM-IT500
Note: Specification and a photo of the instrument are those of JSM-IT500(LA).

Annual unit sales target

200 units/year

Link

JEOL Ltd.
JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.

For more information about JEOL Ltd. or any JEOL products, visit www.jeol.com.