The EC-52000IC Ion Cleaner is a device that holdsa specimen of an electron microscope underglow discharge, for removing hydrocarboncontaminants adhered to the specimen byutilizing physical and chemical reactions.The Ion Cleaner prevents specimen contamination,which arises from accumulations of hydrocarboncontaminants when the specimen is irradiatedwith an electron beam in an electron microscope.
  • You can perform specimen treatment while the specimen is being placed on the specimen holder.
  • You can perform cleaning without introducing special gas.
Applicable specimen holders
  • For TEM: EM-21010(SCSH) and same shaped specimen  holders
  • For SEM: JSM-7000F series 12.5 mm-dia. specimen holders


Discharge method Planar electrode type
Working pressure 35 to 40 Pa
Target Carbon
Vacuum chamber About 120 mm (I. D.) × About 40 mm (H)
Discharge voltage Variable
Timer 1, 5, 10, 15, 30, 60 min
Rotary pump 10 L/min

Installation Requirements

Power 100 V AC, 50/60 Hz, 200 VA
and weights 
Main unit 250 mm (W) × 350 mm (D) ×260 mm (H), about 11 kg
Rotary pump 130 mm (W) × 228 mm (D) ×165 mm (H), about 5.5 kg
of use
20±5 ℃
Humidity 60% or less

*Specifications subject to change without notice.

Installation Examples

Introduction to JEOL Products

Inquiry about EC-52000IC

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