JSM-7610F is an ultra high resolution Schottky Field Emission Scanning Electron Microscope which has semi-in-lens objective lens. High power optics can provide high throughput and high performance analysis. It’s also suitable for high spatial resolution analysis. Furthermore, Gentle Beam mode can reduce the incident electron penetration to the specimen, enabling you to observe its topmost surface by using a few hundred landing energy.

High resolution imaging and high performance analysis by semi-in-lens objective lens

The JSM-7610F combines two proven technologies – an electron column with semi-in-lens objective lens which can provide high resolution imaging by low accelerating voltage and an in-lens Schottky FEG which can provide stable large probe current – to deliver ultrahigh resolution with wide range of probe currents for all applications (A few pA to more than 200 nA).
The in-lens Schottky FEG is a combination of a Schottky FEG and the first condenser lens and is designed to collect the electrons from the emitter efficiently.

The topmost surface imaging at low accelerating voltage by Gentle Beam mode (GB)

The Gentle Beam (GB) mode applies a negative voltage to a specimen and decelerates incident electrons just before they irradiate the specimen, thus the resolution is improved at an extremely low accelerating voltage.
Therefore, 7610F is possible to observe a topmost surface by a few hundred eV which were difficult to observe conventionally and nonconductive samples such as ceramics and semiconductor etc.

High throughput and high performance analysis by High Power Optics

The High Power Optics produces fine electron probe for both observation and analysis.
The aperture angle control lens maintains a small probe diameter even at a larger probe current.
Using both techniques, the 7610F is suitable for a wide variety of analysis with EDS, WDS, CL etc

Application examples

  • High resolution imaging by semi-in-lens objective lens
    Pt Catalyst
    Sample: Pt Catalyst Accelerating Voltage 15 kV
    STEM image of CNT
    Sample: Carbon Nanotubes Accelerating Voltage 30 kV

  • High spatial resolution analysis by semi-in-lens objective lens
    LED cross section
    LED cross section (EDS analysis of multilayers below 100 nm)

  • The topmost surface imaging at ultra low landing energy by Gentle Beam mode (GB)
    Paper filter
    Sample: filter Landing energy 500 eV
    Mesoporous silica
    Sample: Mesoporous Silica Landing energy 800 eV

Specifications

SEI resolution 1.0nm (15kV) , 1.3nm (1kV) , During analysis 3.0 nm (15 kV、 probe current 5 nA)
Magnification 25 to 1,000,000
Accelerating voltage 0.1kV to 30kV
Probe current A few pA  to 200nA 
Aperture angle control lens Built-in
Detectors Upper detector, lower detector
Energy filter New r-filter
Gentle Beam Built-in
Specimen stage Eucentric, 5 axes motor control
  Type Type IA 2 Type II (Optional) Type III (Optional)
  X-Y 70mm×50mm 110mm×80mm 140mm×80mm
  Tilt -5° to ~+70° -5° to +70° -5° to +70°
  Rotation 360°endless 360°endless 360°endless
  WD 1.0mm to 40mm 1.0mm to 40mm 1.0mm to 40mm
Evacuation system Two SIPs, TMP, RP

Principal Options

  • Retractable backscatter electron detector (RBEI)
  • Low angle backscatter electron detector (LABE)
  • Scanning Transmission Electron Detector (STEM)
  • Stage navigation system (SNS)
  • Ion cleaning device
  • Energy dispersive X-ray spectrometer (EDS)
  • Wavelength dispersive X-ray spectrometer (WDS)
  • Cathodoluminescence Detector (CL)
  • Specimen holder A variety of optional specimen holder are available

Installation Examples

Introduction to JEOL Products

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