ultra-high voltage electron microscope, UHV-EM

"Ultra-high voltage electron microscope (UHV-EM)" is an electron microscope which accelerates electrons with a high voltage of 1000 kV or higher. The wavelength of an electron at 1000 kV is shortened down to 0.00087 nm. Utilizing the short wavelength, a resolution of about 0.1 nm has been obtained, and light elements such as carbons have been clearly observed. However, recent high resolution imaging has been achieved by 300 kV microscopes equipped with a spherical aberration corrector. The advantage of UHV-EM is the capability of observing thick specimens using its high transmission power, of investigating radiation damage of specimens using the high energy electron beam and of investigating chemical reaction at controlled conditions utilizing an enough space of a specimen chamber.


The ultra-high voltage electron microscope (UHV-EM) is an electron microscope which accelerates incident electrons with a high voltage of 1000 kV or higher. The wavelength of an electron at 1000 kV is shortened down to 0.00087 nm. Utilizing the short wavelength, a spatial resolution of the microscope image with about 0.1 nm has been attained. The other advantages of UHV-EM include observation of thick specimens using its high transmission power, investigation of radiation damage of specimens using its high-energy electron beam, and study of chemical reactions under controlled environments by utilizing a large space of the specimen chamber.
 

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