Applications of High-Power Built-in Plasma Gun:The example of optical thin-film production by plasma assisted vapor deposition.

  • 概要

JEOLnews Volume 37E, Number 1, 2002

A built-in plasma source is installed in a vacuum chamber and generates high-density plasma. Plasma assistance to e-beam deposition is very effective for optical thin-films. Here, introduce the outline of the built-in plasma source and the film characteristic of oxide films as compared with normal vacuum deposited films.