Micro Area Analysis with JXA-8530F (FE-EPMA)
JEOLnews Volume 45, Number 1, 2010
Norihisa Mori
SA Business Unit, JEOL Ltd.
The FE-EPMA, an electron probe micro analyzer (EPMA) equipped with a Schottky field emission (FE) electron gun, is designed to enhance the micro area analysis capability, achieving an analytical area of only 0.1 m in size. Micro area analyses were studied on stainless steel and solder samples with a FE-EPMA to evaluate its spatial resolution, micro particle detection, and ability to quantify micro areas.
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