High-power Electron Beam Source used for Melting Metal Materials :Vacuum melting furnace for polycrystalline silicon refinement

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JEOLnews Volume 43, Number 1, 2008

JEBG-3000UB is a high-power electron beam source of 300kW output and is used for vacuum melting/refining of metal material. As the example, the melted purification process, metallurgical method, in the polycrystalline silicon manufacturing process for solar cells is introduced.

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