Cathode luminescence in EPMA
Cathodeluminescence (CL) is a technique used to study crystalline structure, trace impurities, lattice defects, and crystalline distortion.A cathodeluminescence device can be installed on a JXA-8800 electron probe micro analyzer (EPMA) that is also being used for secondary electron and
backscattered electron imaging, and elemental analysis with WDS.Below are some examples of samples analyzed in this combined system.
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