Analyzing conditions for high spatial resolution X-ray images

  • Summary

Electron probe micro analyzers (EPMA) using LaB6 and field emission (FE) electron sources can achieve higher spatial resolution than those with the conventional W filament.In general, it is expected that the smaller the electron source the higher the spatial resolution of the images or analyses.However, the spatial resolution is also influenced by the analytical conditions, and under some conditions the EPMA is unable to achieve its full potential.
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