Analysis of Surface Nano Structure in Angle Resolved Auger-XPS High sensitivity surface analysis using ARXPS

  • Summary

Angle resolved X-ray photoelectron spectroscopy (ARXPS) is a technique to control the detection depth of a sample by changing the sample tilt angle with reference to the analyzer. Unlike depth profiling with ion sputtering, ARXPS is capable of non destructive analysis of areas deep down to the escape depth of photoelectrons. Data acquired in ARXPS determine the following:
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