Hyperspectral Mappig-Combining Cathodoluminescence and X-ray Collection in an Electron Microprobe

ABSTRACT An optical spectrometer has been integrated into JEOL 8900R electron microprobe, which allows simultaneous collection of light, X-ray, and electron signals. The cathodoluminescence signal is collected from a monocular eyepiece, which is integrated into the electron optics of the electron microprobe. The optical acquisition is synchronized with the stage motion. X-ray lines of major elements are collected using an energy dispersive spectrometer, X-ray lines of minor elements are collected using wavelength dispersive spectrometers, and the secondary and backscattered electron signals are collected using standard detectors. In mapping mode of operation the different signals are collected at each pixel with map sizes typically ranging from 1 million to 10 million pixels. This represents a significant amount of data from which the major correlations and associations in the map can be determined. Summing over a small number of channels and examining only a subset of the complete wavelength range are the strategies that have been developed to reduce the size of the data handled. The application of this mapping technique is demonstrated with two examples, zircons and refractory bricks. Zircons with various degrees of metamictization have been characterized, and inclusions differentiated using a combination of cathodoluminescence and X-ray maps. Examination of refractory bricks reveals subtle chemical changes in the spinel grains. Microsc. Res. Tech. 67; 271-277,2005