Release of the JXA-8530FPlus, a New Electron Probe Microanalyzer – High Throughput Analysis by the Improved Electron Optical System –


JEOL Ltd. (President Gon-emon Kurihara) announces the release of the JXA-8530FPlus Electron Probe Microanalyzer (EPMA) equipped with the In-Lens Schottky Plus FEG (field emission gun), to be distributed in January 5, 2017.

Product development background

JEOL commercialized the world’s first FE-EPMA, the JXA-8500F in 2003. This highly regarded FE-EPMA has long been used in various fields, such as: metals, materials and geology in both industry and academia.
The JXA-8530FPlus is a third-generation FE-EPMA that comes with enhanced analytical and imaging capabilities, delivered by an improved electron optical system. The In-Lens Schottky FEG combined with new software provides higher throughput. This new cutting-edge FE-EPMA also adopts a highly-expandable multipurpose chamber. Incorporating various functions, the JXA-8530FPlus meets a variety of demands of users while maintaining high stability, thus allowing a wider range of EPMA applications to be achieved with higher resolution.
This analyzer will be offered to university laboratories and public R&D sites

Main Features

  1. In-lens Schottky Plus FEG EPMA version
    The In-Lens Schottky Plus FEG EPMA version, with an optimized angular current density, allows for analysis with a large probe current of 2 μA or more. The guaranteed resolution of secondary electron image has been improved even under analytical conditions by automatically adjusting for the correct convergence angle.
  2. Advanced software
    A wealth of Microsoft Windows®-based advanced applications systems are available, including: 1) Trace Element Analysis Program for simpler, optimized analysis of trace elements including adding data collected from up to 5 spectrometers, 2) Phase Map Maker for automatic creation of phase maps based on principal components, 3) Non-Flat Surface Analysis Program for automated WDS analysis of specimens with surface irregularities. 
    Notices:Windows is a registered trademark of Microsoft Corporation in the United States and other countries.
  3. Flexible WDS configuration
    Various X-ray spectrometers (WDSs) can be selected: a Rowland circle radius of 140 mm (140R) or 100 mm (100R), 2 crystal or 4 crystal configurations and a mix of standard or large size crystals. The XCE (2 xtl) X-ray Spectrometer, the FCS (4 xtl) X-ray spectrometer and the L (large 2 xtl) X-ray Spectrometer for 140R have wide spectrometry range and provide superior wavelength resolution and peak-to-background ratio. The H Type X-ray Spectrometer of 100R provides high X-ray intensity. Users can select from these spectrometers depending on requirements.
  4. Combined WDS/EDS system
    The JXA-8530FPlus comes with JEOL’s 30 mm2 silicon-drift detector (SDD). A high count-rate SDD along with an in-situ variable aperture enables EDS analysis at WDS conditions. EDS spectra, maps and line scans can be acquired simultaneously with WDS data.
  5. Multipurpose chamber
    The JXA-8530FPlus is equipped with a highly-expandable specimen chamber and specimen exchange chamber, enabling you to integrate a variety of optional attachments on the chamber.
    These include:
    • Electron Backscatter Diffraction System (EBSD)
    • Cathodoluminescence Detectors (panchromatic, monochromatic, full color hyperspectral)
    • Soft X-ray Emission Spectrometer
    • Air Isolated Transfer Vessel
    • High Etching Rate Ion Source
  6. Powerful clean vacuum system
    A powerful, clean vacuum system is employed on the JXA-8530FPlus, including two magnetic-levitation turbo molecular pumps. In addition, a two-stage intermediate chamber is provided for the electron optical column, thus maintaining high vacuum in the electron-gun chamber by differential pumping. The addition of optional Scroll pumps and a liquid nitrogen cold finger creates the ultimate oil free vacuum system.
  7. Soft X-ray Emission Spectrometer (SXES)
    An ultra-high energy-resolution Soft X-ray Emission Spectrometer was co-developed by the Institute of Multidisciplinary Research for Advanced Materials, Tohoku University (Prof. M. Terauchi) and JEOL Ltd., etc.
    The variable-line-spacing (VLS) grating enables simultaneous detection (much like EDS) and allows detection of Li-K and B-K spectra with a high-sensitivity CCD. This spectrometer achieves superbly high energy-resolution, enabling detailed chemical-bonding state analysis.
  8. miXcroscopy (Correlative microscope)
    Regions of interest, along with X-Y stage coordinates, located in the optical microscope can be recorded and transferred to the EPMA for navigation to the desired location for imaging and analysis.

Main Specifications

Elemental analysis range WDS: (Be) B to U, EDS: B to U
X-ray spectrometry range WDS spectrometry range: 0.087 to 9.3 nm
EDS energy range: 20 keV
Number of X-ray spectrometers WDS: 1 to 5 selectable, EDS: 1
Maximum specimen size 100 mm × 100 mm × 50 mm (H)
Accelerating voltage 1 to 30 kV (0.1 kV step)
Probe current stability ± 0.3%/h (10 kV, 50 nA)
Secondary electron image resolution 3 nm at WD 11 mm, 30 kV
20 nm at 10 kV, 10 nA, WD 11 mm
50 nm at 10 kV, 100 nA, WD 11 mm
Magnification ×40 to ×300,000 (WD 11 mm)
Scanning image pixel resolution Up to 5,120 × 3,840

Annual unit sales target

35 units/year (initial year)