Release of a New Schottky Field Emission Scanning Electron Microscope JSM-F100 ― The next level of analytical intelligence in FE-SEM for combining high resolution and operability ―


JEOL Ltd. (President & COO Izumi Oi) announces the release of a new Schottky field emission scanning electron microscope, JSM-F100, to be released in August 2019.

Product development background

Scanning electron microscopes (SEMs) are used in a wide range of fields, such as nanotechnology, metals, semiconductors, ceramics, medicine, and biology. As SEM applications are expanding to not only cover research and development, but also address quality control and product inspection at manufacturing sites, SEM users are in need of fast high-quality data acquisition, as well as simple compositional information confirmation with seamless analytical operation.

To meet these demands, the JSM-F100 incorporates not only our highly regarded In-lens Schottky Plus field emission electron gun and "Neo Engine" (electron optical control system), but also a new GUI "SEM Center" and an innovative "LIVE-AI (Live Image Visual Enhancer-Artificial Intelligence) filter". This enables an optimal combination of high spatial resolution imaging and high operability. Furthermore, the JSM-F100 comes with a JEOL energy dispersive X-ray spectrometer (EDS), which is fully integrated within "SEM Center" for seamless acquisition from images to elemental analysis results. Inspired by users in pursuing the evolution, and integration, of high performance and operability, the JSM-F100 achieves a superb work efficiency, 50% or higher than that of our previous JSM-7000 series, leading to dramatically increased high throughput capabilities.

Main Features

  • In-lens Schottky Plus field emission electron gun
    Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current is available at low accelerating voltage, supporting various capabilities from high resolution imaging to high speed elemental mapping.
  • Hybrid Lens (HL)
    The Hybrid Lens (HL), a combination of the electrostatic and magnetic field lens, supports high spatial resolution imaging and analysis of various specimens ranging from magnetic materials to insulators.
  • Neo Engine (New Electron Optical Engine)
    Neo Engine, a cutting-edge electron optical control system, achieves a significantly improved precision of automatic functions, as well as a superbly higher operability.
  • New function of "SEM Center" for integrating EDS
    A newly developed operation GUI "SEM Center" fully integrates SEM imaging and EDS analysis. This powerful function provides next-generation operability and high resolution images obtained with FE-SEM.
  • New "Zeromag" function
    "Zeromag", incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.
  • New LIVE-AI filter*
    Utilizing the AI (artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter can display a seamless moving live image with no residual image. This unique feature is very effective for quickly searching observation areas, focusing, and stigmator adjustment.


Main Specifications

Resolution (1 kV) 1.3 nm
Resolution (20 kV) 0.9 nm
Accelerating voltage 0.01 to 30 kV
Standard detectors Upper Electron Detector (UED), Secondary Electron Detector (SED)
Electron gun In-lens Schottky Plus field emission electron gun
Probe current A few pA to 300 nA (30 kV)
A few pA to 100 nA (5 kV)
Objective lens Hybrid Lens (HL)
Specimen stage Full eucentric goniometer stage
Specimen movement X: 70 mm,  Y: 50 mm,  Z: 2 to 41 mm
Tilt: –5 to 70°,  Rotation: 360°
EDS detector Energy resolution: 133 eV or less
Detectable elements: B (boron) to U (uranium)
Detection area: 60 mm2

Annual unit sales target

60 units/year