Release of a New Schottky Field Emission Scanning Electron Microscope JSM-IT800 -FE-SEM with Intelligence Technology (IT) Platform-

2020/05/25

JEOL Ltd. (President & COO Izumi Oi) announces the release of a new Schottky field emission scanning electron microscope, JSM-IT800, to be released in May 2020.

Product Development Background

Scanning electron microscopes (SEMs) are used in a wide range of fields, such as nanotechnology, metals, semiconductors, ceramics, medicine, and biology. As SEM applications are expanding to not only cover research and development, but also address quality control and product inspection at manufacturing sites, SEM users are in need of fast high-quality data acquisition, as well as simple compositional information confirmation with seamless analytical operation.

To meet these demands, the JSM-IT800, with the Intelligence Technology (IT) platform, incorporates our In-lens Schottky Plus field emission electron gun for high resolution imaging to fast elemental mapping, and an innovative electron optical control system "Neo Engine", as well as a seamless GUI "SEM Center" for full integration of a JEOL energy dispersive X-ray spectrometer (EDS). Furthermore, the JSM-IT800 allows for two types of objective lens configurations, offering different versions to satisfy various users requirements.

The two versions of the JSM-IT800 include the Hybrid Lens (HL) version for a general-purpose SEM and the Super Hybrid Lens (SHL) version for enhanced high resolution observation and various analyses. In addition, the JSM-IT800 of the SHL version comes with a new Upper Hybrid Detector (UHD) to acquire higher signal-to-noise ratio images for the study of fine structures of specimens.

The JSM-IT800 can also be equipped with a new Scintillator Backscattered Electron Detector (SBED) and a Versatile Backscattered Electron Detector (VBED). The SBED enables acquisition of images with high responsiveness and produces sharp material contrast even at low accelerating voltage. The VBED can acquire 3D-, topographic-, and material-contrast images.

Main Features

  • In-lens Schottky Plus field emission electron gun
    Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current is available at low accelerating voltage (100 nA at 5 kV). The unique In-lens Schottky Plus system allows for a variety of applications, from high resolution imaging to fast elemental mapping, electron backscatter diffraction (EBSD) analysis, and soft X-ray emission spectroscopy (SXES), without the requirement to change lens conditions.
  • Neo Engine (New Electron Optical Engine)
    Neo Engine is a cutting-edge electron optical system that accumulates JEOL core technologies of many years. Users can perform stable observation even when changing different observation or analytical conditions. High operability for automatic functions is greatly enhanced.
  • SEM Center / EDS Integration
    A GUI "SEM Center" fully integrates with SEM imaging and EDS analysis for providing seamless and intuitive operations. The JSM-IT800 can be enhanced by incorporating optional software add-ons, such as SMILENAVI to assist and provide a learning path for novice users and the LIVE-AI filter (Live Image Visual Enhancer – AI) to acquire a higher quality of live images.
  • Hybrid Lens (HL) version and Super Hybrid Lens (SHL) version
    Based on a combination of the electrostatic and electromagnetic-field lens, two types of objective lens versions are available. The different configurations allow for a wider variety of needs of users to be met, achieving high spatial resolution imaging and analysis of a broad range of samples, from magnetic materials to insulators, while maintaining the same features of the JSM-IT800.
  • Upper Hybrid Detector (UHD)
    The UHD, built into the objective lens for the SHL version, greatly improves detection efficiency of electrons generated from the specimen. This leads to acquisition of images with a higher signal-to-noise ratio.
  • New Backscattered Electron Detectors
    The Scintillator Backscattered Electron Detector (SBED, optional) has high responsiveness and is suitable to acquire material-contrast images at low accelerating voltage. The Versatile Backscattered Electron Detector (VBED, optional) with a segmented detector element design, allows the user the choice to configure the individual segments or use preprogrammed detector settings to acquire images to give three-dimensional, topographical, or compositional information.

Main Specifications

JSM-IT800 SHL version JSM-IT800 HL version
Resolution (1 kV) 0.7 nm 1.3 nm
Resolution (15 kV) 0.5 nm -
Resolution (20 kV) - 0.9 nm
Accelerating voltage 0.01 to 30 kV
Standard detector Secondary Electron Detector (SED)
Upper Hybrid Detector (UHD) Upper Electron Detector (UED)
Electron gun In-lens Schottky Plus field emission electron gun
Probe current A few pA to 500 nA (30 kV) A few pA to 300 nA (30 kV)
A few pA to 100 nA (5 kV)
Objective lens Super Hybrid Lens (SHL) Hybrid Lens (HL)
Specimen stage Full eucentric goniometer stage
Specimen movement X: 70 mm  Y: 50 mm  Z: 1 to 41 mm
Tilt: –5 to 70°  Rotation: 360°
EDS detector Energy resolution: 133 eV or better
Detectable elements: B to U
Detection area: 60 mm2
JSM-IT800

Annual unit sales target

1) JSM-IT800 SHL version: 90 units/year
2) JSM-IT800 HL version: 50 units/year