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BS-04series Rotary Sensor
A sensor for a crystal oscillator film-thickness controller incorporating 6 or 12 crystals
  • Used to measure the film thickness and film generation rate during thin film processing.
  • When a crystal fails, the sensor can be used as is by switching to the next crystal.
  • Since the detector aperture is at a fixed position, it is not necessary to change the Tooling Factor for each crystal shift.
  • There are 2 types of sensor heads; flat and 45°. These can be used selectively according to the mounting position.
  • Suitable for long-term, high volume vacuum deposition or sputtering processes.



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