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The EC-52000IC Ion Cleaner is a device that holdsa specimen of an electron microscope underglow discharge, for removing hydrocarboncontaminants adhered to the specimen byutilizing physical and chemical reactions.The Ion Cleaner prevents specimen contamination,which arises from accumulations of hydrocarboncontaminants when the specimen is irradiatedwith an electron beam in an electron microscope.
- You can perform specimen treatment while the specimen is being placed on the specimen holder.
- You can perform cleaning without introducing special gas.
- For TEM: EM-21010(SCSH) and same shaped specimen holders
- For SEM: JSM-7000F series 12.5 mm-dia. specimen holders
|Discharge method||Planar electrode type|
|Working pressure||35 to 40 Pa|
|Vacuum chamber||About 120 mm (I. D.) × About 40 mm (H)|
|Timer||1, 5, 10, 15, 30, 60 min|
|Rotary pump||10 L/min|
|Power||100 V AC, 50/60 Hz, 200 VA|
|Main unit||250 mm (W) × 350 mm (D) ×260 mm (H), about 11 kg|
|Rotary pump||130 mm (W) × 228 mm (D) ×165 mm (H), about 5.5 kg|
|Humidity||60% or less|
*Specifications subject to change without notice.