JEM-ACE200F High Throughput Analytical Electron Microscope

Basic Unit platform

• Cold-FEG is standard.
• Installation of Cs corrector is possible.
• High speed and high sensitivity stage. Three times faster than the existing motor drive and fine movement control similar to the piezo drive control is available.

Easy Operation

• Intuitive operation is available even for inexperienced operator of TEM
  • Minimizes the operations that are using the operation panel and the final image can be obtained while clicking the buttons on the screen in order.
  • Focus adjustment can be performed by mouse operation.
  • Integration with Gatan camera is possible.
• Automatic microscope tuning functions
  • Autofocus, automatic astigmatism, automatic specimen height adjustment, automatic beam centering, and automatic orientation, etc.

Automatic data acquisition function

• The recipe software "Automation Center" enable automatic data acquisition
  • TEM image, STEM image, elemental mapping by EDS.
  • Several specimens on a grid can be handled.

Linkage with critical dimension measurement software

• Magnification calibration is available for each magnification set on the TEM side.
  • Automatic critical dimension measurement is available for data acquired by more than one JEM-ACE200F.

Remote operation

• Next room operation
• Remote operation and simultaneous observation at more than one location (subject to network environment)
  • Enables observation while discussing with multiple business locations.

Improvement of environmental resistance by column enclosure

• Contributes to controlling the impact from changes of noise, air flow, and room temperature.
• Further soundproofing measures are possible by attaching acoustic material to the interior walls.

From Analysis instruments to Analysis tool

Link

• News release
  Release of the New High Throughput Analytical Electron Microscope JEM-ACE200F