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JEM-ARM200F NEOARM Atomic Resolution Analytical Electron Microscope

"NEOARM" / JEM-ARM200F comes with JEOL’s unique cold field emission gun (Cold FEG) and a new Cs corrector (ASCOR) that compensates for higher order aberrations. The combination of a Cold FEG and ASCOR enables atomic-resolution imaging at not only 200 kV accelerating voltage, but also a low voltage of 30 kV.
"NEOARM" is also equipped with an automated aberration correction system that incorporates JEOL’s new aberration correction algorithm for automatic fast and precise aberration correction. This system enables higher-throughput atomic-resolution imaging.
Furthermore, a new STEM detector that provides enhanced contrast of light elements is incorporated as a standard unit. Contrast enhancement of light elements is achieved by a new STEM imaging technique (e-ABF: enhanced ABF), facilitating observation of light-element materials, even at low accelerating voltages.
The microscope room is separated from the operation room to respond to a remote operation. In addition, JEOL products’ new concept colors of "pure white" and "JEOL silver" are adopted, leading to a sophisticated exterior design of "NEOARM".

Feature 1

Spherical aberration (Cs) corrector ASCOR (Advanced STEM corrector)

ASCOR incorporated in "NEOARM" can suppress the six-fold astigmatism which limits resolution after Cs correction.
The combination of ASCOR and Cold FEG gives low chromatic aberration and expands the diffraction limit, achieving higher resolution than ever.

GaN [211]:200 kV

Si [110]:80 kV

Graphene (mono layer):30 kV

* STEM image by UHR cofiguration

Atomic resolution ADF-STEM images, their FFT patterns and Ronchigram images, obtained at 200kV, 80kV and 30kV

Feature 2

Automatic aberration correction software JEOL COSMO™ (Corrector System Module)

JEOL COSMO™ adopts a new aberration correction algorithm (SRAM: Segmented Ronchigram Auto-correlation function Matrix). Thus, no special sample is required for aberration correction, leading to high-precision and quick correction of higher order aberrations. This system enables fast processing compared to the conventional correction algorithm and also automates the operations, thus eliminating a complicated correction workflow in the customer microscope. These features enable higher-throughput atomic-resolution imaging.

Sample: Si[110]
Accelerating voltage: 200 kV

Feature 3

New ABF (Annular Bright Field) detector system

The ABF detector is widely used as a technique suitable for high-resolution imaging of light elements. "NEOARM" supports enhanced contrast of light elements by a newly-designed ABF imaging technique (e-ABF:enhanced ABF).
This capability facilitates atomic-level structure observation of materials containing light elements.

Enhanced contrast of light atoms

Reference: S.D. Findlay, Y.Kohno, L.A. Cardamone, Y.Ikuhara, N.Shibata, Ultramicroscopy 136 (2014)31-41.

Feature 4

Perfect sight detector

The perfect sight detector, integrated into "NEOARM", uses hybrid scintillators.
This detector always enables the acquisition of high-contrast and quantitative STEM images, irrespective of accelerating voltage settings.

Feature 5

Viewing Camera system

"NEOARM" comes with the Viewing Camera system. This image observation system uses a dual camera, intended to be used for remote operations.
Thus, the system allows for the remote operations in a room separated from the microscope room and also enables a flexible operation environment. In addition, the NEOARM adopts JEOL products’ new concept colors of "pure white" and "JEOL silver" for a sophisticated exterior design.


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Resolution*1 STEM HAADF image 70 pm (200 kV), 100 pm (80 kV), 160 pm (30 kV)
TEM information limit 100 pm (200 kV), 110 pm (80 kV), 250 pm (30 kV)
Electron gun Cold field emission gun (Cold FEG): standard
Aberration corrector STEM: NEO ASCOR HOAC*2, TEM: CETCOR with DSS*3
Corrector auto tuning system NEO JEOL COSMO™ Auto tuning system Ad-hock tune (SIAM) built-in
Accelerating voltage 30 to 200 kV (30, 80, 200 kV: standard,  60, 120 kV: optional)
Magnetic field free mode Lorentz lens settings (×50 to 80 k on screen): standard
Specimen movement system X, Y and Z super-fine mechanical drive, ultra-fine piezo device drives: standard
Operation type RDS*4 operation

*1 UHR (UHR with STEM/TEM Cs corrector configured)
*2 HOAC (Higher order aberration corrector)
*3 DSS (DeScan system)
*4 RDS (Room divided style)


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