• Features
  • Specifications
  • Application
  • Related Products
  • Information

Features

JEM-ARM300F2 GRAND ARM™2 Atomic Resolution Analytical Microscope

A New Atomic Resolution Electron Microscope has been released!

The "GRAND ARM™2" has been upgraded.
This new "GRAND ARM™2" enables observation at ultrahigh spatial resolution with highly sensitive analysis over a wide range of accelerating voltages.

Feature 1

FHP2 newly developed objective lens pole-piece

The FHP objective lens pole piece is optimized for ultrahigh spatial resolution observation.
While maintaining this capability, the shape of the pole piece was further optimized for X-ray solid angle and take-off angle of the large-sized Dual SDDs (158 mm2).
As the result, the effective X-ray detection efficiency of the FHP2 is more than twice as sensitive as that of the FHP. It can provide sub-angstrom resolution in EDS elemental maps.

GaN[211]原子分解能STEM像&EDSマップ@300 kV
Atomic resolution STEM-HAADF/ABF images and EDS maps for GaN[211]
 

Feature 2

New enclosure

The TEM column is covered by a box-type enclosure, which can reduce the effect of environmental changes such as temperature, air flow, acoustic noise and so on, and then it improves the stability of microscope.

New enclosureー

Feature 3

ETA corrector & JEOL COSMO™
 Quick & Accurate aberration correction

JEOL COSMO™ uses only 2 Ronchigrams acquired from any amorphous area to measure and correct aberrations.
Therefore, the system can provide Quick and Accurate aberration correction without dedicated specimens.

Feature 4

Improvement of stability

New CFEG (Cold Field Emission electron Gun) adopted a smaller SIP with a larger evacuation volume than before for GRAND ARM™2. Enhancement of evacuation volume of SIP improves the degree of vacuum near the emitter inside CFEG, and also improves the stability of emission and probe currents. The miniaturization of SIP can reduce the total mass of CFEG by ~100 kg.
The weight saving of CFEG improves resistance to vibration for the microscope.

Other improvements also enhance the stability and resistance to various disturbance for the microscope.

Comparison of probe current stability between old and new CFEG.
Acceleration
voltage
GRAND ARM™
(FHP)
GRAND ARM™2
(FHP2)
300 kV 63 pm 53 pm
200 kV 78 pm 63 pm
80 kV 136 pm 96 pm
60 kV 136 pm 96 pm
40 kV 192 pm 136 pm
Acceleration
voltage
GRAND ARM™
(WGP)
GRAND ARM™2
(WGP)
300 kV 82 pm 59 pm
200 kV 105 pm 82 pm
80 kV 136 pm 111 pm
60 kV 192 pm 136 pm
40 kV 313 pm 192 pm

Table 1. Guaranteed STEM image resolution with STEM ETA corrector for GRAND ARM™ and GRAND ARM™2.

Feature 5

OBF System (Option)

In the new imaging method 'OBF STEM (Optimum Bright Field STEM)', raw images acquired by a segmented STEM detector are used as the source for a phase image reconstruction, with dedicated Fourier filters to maximize the signal to noise ratio of retrieved image.
This promising method realizes higher contrast for both heavy and light elements even while operating under extremely low electron dose conditions. Beam sensitive materials difficult to observe with standard ADF and ABF STEM methods can be easily analyzed with higher contrast at a wide range of magnifications.

K. Ooe, T. Seki, et al., Ultramicroscopy 220, 113133 (2021)

STEM Low Dose Imaging

The beam sensitive materials including Metal Organic Frameworks (MOFs) and Zeolites require a reduced electron dose (typically, probe current < 1.0 pA) while maintaining clear atomic contrasts for the framework of light elements.
The OBF STEM has an advantage for such low dose experiments, realizing ultra high dose-efficient STEM imaging in an atomic resolution. The OBF STEM image of MOF MIL-101 (left) and MFI Zeolite (right) can be acquired in a single shot with higher spatial resolution 1.8 Å and 1.0 Å, respectively. The enhanced contrast and resolution can be also confirmed in each stack averaged image (insets).

Sample: MOF MIL-101

Sample : MOF MIL-101
Instrument : JEM-ARM300F2
Accelerating Voltage : 300 kV
Convergence Semi-angle : 7 mrad
Probe current : < 0.15 pA
Insets) FFT pattern and 50 frames averaged image
Sample courtesy of Prof. Zhenxia Zhao, Guangxi University

Sample: MFI Zeolite

Sample : MFI Zeolite
Instrument : JEM-ARM300F2
Accelerating Voltage : 300 kV
Convergence Semi-angle : 13 mrad
Probe current : 0.3 pA
Insets) FFT pattern and 10 frames averaged image

High Contrast Imaging for Light Elements

In addition to being highly dose efficient, OBF STEM is also advantageous for light element imaging.
Even in a lower acceleration voltage, both higher contrast and spatial resolution can be achieved for light elements.

Sample : GaN [110]
Sample : GaN [110]
Instrument : JEM-ARM200F
Accelerating Voltage : 60 kV
Convergence Semi-angle : 35 mrad
Sample : Graphene
Sample : Graphene
Instrument : JEM-ARM200F
Accelerating Voltage : 60 kV
Convergence Semi-angle : 35 mrad

The resolution for light elements becomes much better with a higher acceleration voltage.
Each atomic column is now clearly separated with a deep sub-angstrom resolution inside complex structures or along higher-index crystallographic axes.
The quality of OBF STEM is excellent in low dose conditions, and further enhanced under the standard probe conditions of a Cs-corrected electron microscope.

Sample : β-Si3N4 [0001]
Sample : β-Si3N4 [0001]
Instrument : JEM-ARM200F
Accelerating Voltage : 200 kV
Convergence Semi-angle : 24 mrad
Inset) 10 frames averaged
Sample : GaN [211]
Sample : GaN [211]
Instrument : JEM-ARM300F2
Accelerating Voltage : 300 kV
Convergence Semi-angle : 32 mrad
Inset) 20 frames averaged

*e-ABF (enhanced ABF) is not available in SAAF Quad configuration.

Live OBF Imaging

In an actual experiment, live OBF imaging is fundamental for beam sensitive materials as all operations should be performed in a dose limited condition. The live function is included in the OBF system, implemented within the TEM control software, with simple GUI control and real time display updates alongside conventional STEM images.

Movie

Live observation of OBF-STEM images with JEM-ARM200F

◆Click the "replay" button in the box above, and the movie will start (about 1 min.) ◆

Link

Download

Specifications

Main Specifications

Version Ultra-high resolution
configuration
High resolution
configuration
Objective lens
polepiece
FHP2 WGP
Standard
Accelerating
Voltage
300kV, 80kV
Electron gun Cold field emission gun
STEM Resolution 300kV / 80kV STEM Cs corrector installed
53pm / 96pm  59pm / 111pm 
TEM Resolution 300 kV / 80 kV TEM Cs corrector installed
Lattice resolution 50pm / - Lattice resolution 60 pm / -
Non-linear information limit
60pm / 90pm
Non-linear information limit
70pm / 100pm
Linear information limit
90pm / 160pm 
Linear information limit
100pm / 170pm
Maximum tilt
angle
When using JEOL specimen tilting holder for analyses
X:± 30°/ Y:± 27° X:± 36°/ Y:± 31°
When using High tilt specimen holder
X:± 90° X:± 90°

Gallery

Related Products

Information

Installation Examples