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Features

JIB-4700F Multi Beam System
Advances in the development of new materials featuring complex nanostructures places increased demands on FIB-SEM instruments for exceptional resolution, accuracy and throughput. In response, JEOL has developed the JIB-4700F Multi Beam System to be used in morphological observations, elemental and crystallographic analyses of a variety of specimens.

The JIB-4700F features a hybrid conical objective lens, GENTLEBEAM™ (GB) mode and an in-lens detector system to deliver a guaranteed resolution of 1.6nm at a low accelerating voltage of 1 kV. Using an "in-lens Schottky-emission electron gun" that produces an electron beam with a maximum probe-current of 300nA, this newly-developed instrument allows for high-resolution observations and fast analyses. For the FIB column, a high-current density Ga ion beam of up to 90nA maximum probe-current is employed for fast ion milling and processing of specimens.
Concurrent with high-speed cross-section processing by FIB, high-resolution SEM observations and fast analyses can be conducted utilizing energy dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD). Additionally, a three-dimensional analysis function that automatically captures SEM images at certain intervals in cross-section processing is provided as one of the JIB-4700F's standard features. 

High resolution SEM observation

Guaranteed resolution of 1.6 nm at a low accelerating voltage of 1 kV is delivered by a magnetic/electrostatic hybrid conical objective lens, GB mode and in-lens detector.

Fast analysis

Fast analysis is enabled because high resolution can be maintained in analyses under large probe-current by the combination with an in-lens Schottky-emission electron gun and aperture angle control lens.

High speed processing

High-power Ga ion beam column enables rapid processing of specimens.

Enhanced detection system

Simultaneous detection system involving the newly-developed in-lens detectors allows for real-time observation of images from up to 4 detectors.

Versatility

The JIB-4700F is compatible with a variety of optional attachments including EDS, EBSD, cryo-transfer systems, cooling stages and air-isolated transfer systems, etc.

Three-dimensional observation/analysis

Three-dimensional visualization of images and analysis data is possible with the combination with high-resolution SEM and appropriate optional analysis unit(s).

Stage linkage function

With the atmosphere pick-up system (optional) and stage linkage function, TEM (transmission electron microscope) specimens can be retracted with ease.

Picture overlay system

Overlaying an optical microscope image from the atmosphere pick-up system on FIB images makes it easier to identify a FIB processing point.

Specifications

SEM
 Accelerating voltage 0.1 to 30.0kV
 Image resolution (at optimum WD) 1.2nm (15kV, GB mode)
1.6nm (1kV, GB mode)
 Magnification  x20 to 1,000,000
(LDF mode available) 
 Probe current  1pA to 300nA 
 Detector (*option)  LED, UED, USD*, BED*, TED*, EDS*
 Specimen stage Computerized 6-axis goniometer stage
X: 50mm, Y: 50mm, Z: 1.5 to 40mm, R: 360°, T: -5 to 70°,
FZ: -3.0 to +3.0mm 
FIB
 Accelerating voltage  1 to 30kV
 Image resolution 4.0nm (30kV)
 Magnification x50 to 1,000,000
(x50 to 90 obtained at 15kV or less)
 Probe current 1 pA to 90 nA, 13 steps
 Processing shapes by milling rectangle, line, spot, circle, bitmap

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