JSM-7500F Field Emission Scanning Electron Microscope** This product is discontinued. **

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JSM-7500F Field Emission Scanning Electron Microscope

A field emission SEM with a semi-in-lens and equipped with a Gentle Beam to deliver high-resolution. Of course, a variety of options can be installed, including element analysis.

Designed for versatility and high resolution

The JSM-7500F features an optical system that includes a semi-in-lens type objective lens, which can collimate the electron beam even at low accelerating voltages. Like a true general-purpose SEM system, JSM-7500F can provide high-resolution imaging of large specimens

Gentle Beam (GB) provides top-surface imaging with ultra-low energy incident electrons

A Gentle Beam (GB mode) with better resolution than the normal mode is available. In GB The combination with the JSM-7500F optical system, which delivers high-resolution, makes it possible to obtain high resolution top-surface images of samples that have been difficult to observe until now, with only a few hundred eV of energy applied to the specimen.

Selective detection of secondary or backscattered electrons with the New r-filter

New r-filter has 4 modes; standard SB (secondary electron detection) mode, standard BE mode (backscattered electron detection), Sb mode (priority for secondary electron), Bs mode (priority for backscattered electron).  Sb mode can be used to detect secondary electrons along with backscattered electrons of a desired percentage.  Bs mode can be used to detect backscattered electrons along with secondary electrons of a desired percentage.
This function features simple one-touch operation from a user-friendly menu.


Resolution 1.0nm(15kV)、1.4nm(1kV)
Magnification ×25 to ×1,000,000
Accelerating voltage 0.1kV to 30kV
Probe current
1pA to 2nA
Aperture angle optimizing lens Built-in
Detectors Upper detector, Lower detector
Energy filter New r-filter
Gentle Beam Built-in
Digital image 1,280×960 pixels, 2,560×1,920 pixels,
5,120×3,840 pixels
Specimen exchange chamber One-action specimen exchange mechanism built-in
Specimen stage Eucentric, 5 axes motor control
 X-Y 70mm×50mm 110mm×80mm 140mm×80mm
 Tilt -5 to +70° -5 to +60° -5 to +60°
 Rotation 360°  360°  360° 
 WD 1.5mm to 25mm 1.5mm to 25mm 1.5mm to 25mm
Evacuation system Three SIPs, TMP, RP, Fore-line trap
Eco design During normal operation : 1.2kVA
During the sleep mode : 1kVA
During the evacuation system OFF : 0.76kVA


CO2/hour CO2/year
During normal operation 0.481kg 4,214kg
During the sleep mode 0.411kg -
During the evacuation system OFF
(Ion pump ON)
0.286kg -

Principal Options

  • Retractable Backscattered Electron Detector
  • In-lens Backscattered Electron Detector
  • Energy Dispersive X-ray Spectrometer (EDS)
  • Electron Back Scatter Diffraction (EBSD)
  • Transmission Electron Detector
  • Liquid Nitrogen Trap


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Installation Examples