JSM-F100 Schottky Field Emission Scanning Electron Microscope

New function of "SEM Center" for integrating EDS

A newly developed operation GUI "SEM Center" fully integrates SEM imaging and EDS analysis. This powerful function provides next-generation operability and high resolution images obtained with FE-SEM.

New "Zeromag" function

"Zeromag", incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.

New LIVE-AI filter *Option

Utilizing the AI (artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter can display a seamless moving live image with no residual image. This unique feature is very effective for quickly searching observation areas, focusing, and stigmator adjustment.

Comparison of normal mode and LIVE-AI filter

In-lens Schottky Plus field emission electron gun (FEG)

Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current is available at low accelerating voltage, supporting various capabilities from high resolution imaging to high speed elemental mapping.

Hybrid Lens (HL)

The Hybrid Lens (HL), a combination of the electrostatic and electromagnetic-field lens, supports high spatial resolution imaging and analysis of various specimens ranging from magnetic materials to insulators.

NeoEngine (New Electron Optical Engine)

Neo Engine, a cutting-edge electron optical control system, achieves a significantly improved precision of automatic functions, as well as a superbly higher operability.

AFS・ACB

Before auto focus adjustment

After auto focus adjustment

ACL (aperture angle control lens)

The JSM-F100 incorporates an aperture angle control lens (ACL). ACL suppresses the spread of the incident electrons for always maintaining a smallest probe. This is achieved by the optimum control of the aperture angle for large variations of the probe current, enabling smooth SEM operations including high resolution imaging and X-ray analysis. Together with the in-lens Schottky electron gun, ACL is of prime importance for supporting this multipurpose SEM.

Detector system

The JSM-F100 can accommodate four detectors to enable you to simultaneously observe various SEM images uniquely formed by each detector. Like the conventional out-lens SEM, the LED (lower electron detector) and the optional RBED (retractable backscattered electron detector) are available. In addition, the JSM-F100 configures two in-lens detectors of the standard UED (upper electron detector) and the optional USD (upper secondary electron detector). The UED forms an SEM image that mixes secondary electrons and high angle backscattered electrons. The USD detects low energy secondary electrons intercepted by an energy filter just beneath the UED, to form an SEM image.

■UED: High-angle backscattered electrons
(compositional & crystalline information)

■USD: Secondary electrons
(surface morphological information)

■RBED: Backscattered electrons
(compositional, crystalline, and topographic information)

■SED: Secondary and backscattered electrons
(topographic information)

SMILE VIEW™ Lab

SMILENAVI *Option

SMILENAVI is an assistant tool designed for beginners to allow smooth basic SEM operations. When the operator clicks the appropriate button as indicated by the SMILENAVI flowchart,the SEM GUI is linked to the click operation for operator guidance. Since the GUI displays operation steps and button locations, operators will be able to operate the SEM without using SMILENAVI.

Link

• News Release
  Release of a New Schottky Field Emission Scanning Electron Microscope JSM-F100
  ― The next level of analytical intelligence in FE-SEM for combining high resolution and operability ―
• JSM-F100 Special Contents　

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