- Scanning Electron Microscope (SEM)
- JSM-IT300 InTouchScope™ Scanning Electron Microscope
JSM-IT300 InTouchScope™ Scanning Electron Microscope** This product is discontinued. **
- Related Products
In addition to the high image quality observation due to the improvement of the illuminating system, the vacuum system and the signal processing system, the JSM-IT300 is a Scanning Electron Microscope, which can be operated with a high throughput by using touch panel operation and the high speed stage.
- Image Quality
Improved electron optics for higher image quality, faster imaging and analysis.
- Less Charging
New scan mode inhibits charging artifacts with non-conductive samples.
- Low Vacuum Mode (LV)
Low vacuum pressure range from 10 to 650Pa extends the range of materials that can be readily observed.
- Specimen Navigation
Fully automated, 5 axis motor stage speeds up search for region of interest (ROI).
Quickly reach the ROI from a color image using the Stage Navigation System (Option).
High Current mode, probe current up to 1μA (≥20kV).
Advanced Zoom Condenser Lens minimizes image and focus shift due to changes in probe current.
Computer eucentric stage rotation allows for easy positioning of a specimen or ROI.
- Large Chamber and Stage
Can accept large and heavy specimens, from 200mm diameter × 80mm tall and up to 2kg.
- Analytical Port Geometry
Multiple ports for a variety of accessories such as: EDS, EBSD and WDS. Co-planar EDS and EBSD geometry. Dual
EDS detectors can be mounted at 180° for high throughput microanalysis.
- Faster Stage Movement
Newly developed motorized stage enables faster positioning (1.5 times faster, compared to other JEOL products).
- Fully Automated 5 Axis Motor Stage
Mechanically eucentric, asynchronous, 5 axis (X, Y, Z, T, R) motor control stage.
Computer eucentric tilt and rotation correction built in for tall specimens or when the ROI is not centered on the rotation axis.
- New Vacuum System
New vacuum system for fast pump down after specimen exchange. Better signal in low vacuum mode.
- In Touch Interface
Comfortable operation is achieved with a newly designed and developed graphical user interface (GUI), which is operate through the touch screen. The GUI size is adjustable so that the work area can be optimized while analysis or data processing is performed.
Multiple user login function for customized workspace and specimen condition settings.
Interchangeable English to Japanese GUI (select through Icon).
|Resolution HV mode||3.0 nm (30 kV) 15.0 nm (1.0 kV)|
|Resolution LV mode||4.0 nm (30 kV BED)|
|Magnification||×5 to ×300,000|
|Preset magnifications||6 levels (Can be set by the user)|
|Electron gun||Fully automatic/Manual adjustment available|
|Filament||Factory pre-centered tungsten hairpin filament|
|Accelerating voltage||0.3 kV to 30 kV|
|Probe current||1 pA to 1 μA|
|Low vacuum pressure setting range*1||10 to 650 Pa|
|Condenser lens||High precision zoom condenser lens|
|Objective lens||Conical lens|
|Objective-lens aperture||3-step selectable with click-stops
Fine position adjustment in X and Y possible.
|Image shift||±50 μm (WD 10 mm)|
Brightness/Contrast, astigmatism correction
|Specimen exchange||Changed by opening the specimen chamber door|
|Maximum specimen||Diameter: 200 mm Height: 80 mm (WD10 mm)|
|Specimen stage||Eucentric goniometer stage
(5 axes motor drive stage)
X:125 mm Y:100 mm Z:80 mm
Tilt: -10 to 90° Rotation: 360°
|Image mode||Secondary electron image, REF image,
Composition image, Topographic image, Shadow image
|Comparison window (Snap shot)||6 shots (Save, load, imaging condition can be reproduced)|
|Monitor||23-inch touch panel
(Display resolution 1,920 × 1,080)
|Number of pixels||640 × 480 1,280 × 960
2,560 × 1,920 5,120 × 3,840
|Image display mode||Multi view, Full screen view, Flexible view,
|Look up table||Available (Gamma correction, pseudo-color)|
|Measurement function||Available (Distance between 2 points,
distance between parallel lines, diameter, etc.)
|Report creation software||Built in|
|Language configuration||Available on UI (Japanese/English)|
|Image auto save||Available|
|Evacuation system||Fully automatic system
TMP: 1 RP: 1 or 2 *1
|Switching vacuum mode||Available on UI (HV/LV)|
Main optionsBackscattered electron detector*1
Low vacuum secondary electron detector
Energy dispersive X-ray analyzer (EDS)
Wave length dispersive X-ray analyzer (WDS)
Crystal Orientation Analyzer
Load lock chamber (Preliminary exchange chamber)
Stage navigation system
LaB6 electron gun
*1 Standard feature only for LV/LA
*2 Dedicated software is required for measurement
* Specification subject to change without notice.