JSM-IT300 InTouchScope™ Scanning Electron Microscope** This product is discontinued. **

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  • Specifications
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JSM-IT300 InTouchScope™ Scanning Electron Microscope
In addition to the high image quality observation due to the improvement of the illuminating system, the vacuum system and the signal processing system, the JSM-IT300 is a Scanning Electron Microscope, which can be operated with a high throughput by using touch panel operation and the high speed stage.

Advanced  Functions

  • Image Quality
    Improved electron optics for higher image quality, faster imaging and analysis.
    High vaccum mode
  • Less Charging
    New scan mode inhibits charging artifacts with non-conductive samples.
  • Low Vacuum Mode (LV)
    Low vacuum pressure range from 10 to 650Pa extends the range of materials that can be readily observed.
    Low vaccum mode
  • Specimen Navigation
    Fully automated, 5 axis motor stage speeds up search for region of interest (ROI).
    Quickly reach the ROI from a color image using the Stage Navigation System (Option).
  • Analysis
    High Current mode, probe current up to 1μA (≥20kV).
    Advanced Zoom Condenser Lens minimizes image and focus shift due to changes in probe current.
    Computer eucentric stage rotation allows for easy positioning of a specimen or ROI.


  • Large Chamber and Stage
    Can accept large and heavy specimens, from 200mm diameter × 80mm tall and up to 2kg.
  • Analytical Port Geometry
    Multiple ports for a variety of accessories such as: EDS, EBSD and WDS. Co-planar EDS and EBSD geometry. Dual
    EDS detectors can be mounted at 180° for high throughput microanalysis.
  • Faster Stage Movement
    Newly developed motorized stage enables faster positioning (1.5 times faster, compared to other JEOL products).
  • Fully Automated 5 Axis Motor Stage
    Mechanically eucentric, asynchronous, 5 axis (X, Y, Z, T, R) motor control stage.
    Computer eucentric tilt and rotation correction built in for tall specimens or when the ROI is not centered on the rotation axis.
  • New Vacuum System
    New vacuum system for fast pump down after specimen exchange. Better signal in low vacuum mode.

Intuitive  Operation

  • In Touch Interface
    Comfortable operation is achieved with a newly designed and developed graphical user interface (GUI), which is operate through the touch screen. The GUI size is adjustable so that the work area can be optimized while analysis or data processing is performed.
  • Multi-user/Multi-task
    Multiple user login function for customized workspace and specimen condition settings.
  • Multi-language
    Interchangeable English to Japanese GUI (select through Icon).


Resolution HV mode 3.0 nm (30 kV) 15.0 nm (1.0 kV)
Resolution LV mode 4.0 nm (30 kV BED)
Magnification ×5 to ×300,000
Preset magnifications 6 levels (Can be set by the user)
Electron gun Fully automatic/Manual adjustment available
Filament Factory pre-centered tungsten hairpin filament
Accelerating voltage 0.3 kV to 30 kV
Probe current 1 pA to 1 μA
Low vacuum pressure setting range*1 10 to 650 Pa
Condenser lens High precision zoom condenser lens
Objective lens Conical lens
Objective-lens aperture 3-step selectable with click-stops
Fine position adjustment in X and Y possible.
Astigmatism memory Available
Image shift ±50 μm (WD 10 mm)
Automatic function Focus
Brightness/Contrast, astigmatism correction
Specimen exchange Changed by opening the specimen chamber door
Maximum specimen Diameter: 200 mm Height: 80 mm (WD10 mm)
Specimen stage Eucentric goniometer stage
(5 axes motor drive stage)
X:125 mm Y:100 mm Z:80 mm
Tilt: -10 to 90° Rotation: 360°
Recipe Available
Image mode Secondary electron image, REF image,
Composition image, Topographic image, Shadow image
Comparison window (Snap shot) 6 shots (Save, load, imaging condition can be reproduced)
OS Windows®7
Monitor 23-inch touch panel
(Display resolution 1,920 × 1,080)
Number of pixels 640 × 480 1,280 × 960
2,560 × 1,920 5,120 × 3,840
Image display mode Multi view, Full screen view, Flexible view,
Add Signals
Look up table Available (Gamma correction, pseudo-color)
Histogram display Available
Measurement function Available (Distance between 2 points,
distance between parallel lines, diameter, etc.)
3D measurement Available*2
Anaglyph image Available
Report creation software Built in
Language configuration Available on UI (Japanese/English)
Image format BMP,TIFF,JPEG
Image auto save Available
Evacuation system Fully automatic system
TMP: 1 RP: 1 or 2 *1
Switching vacuum mode Available on UI (HV/LV)
Notices:Windows is a registered trademark of Microsoft Corporation in the United States and other countries.

Main options

Backscattered electron detector*1
Low vacuum secondary electron detector
Energy dispersive X-ray analyzer (EDS)
Wave length dispersive X-ray analyzer (WDS)
Crystal Orientation Analyzer
Load lock chamber (Preliminary exchange chamber)
Stage navigation system
Chamber scope
Operation panel
LaB6 electron gun
3Dmeasurement software*2
Operation table

*1 Standard feature only for LV/LA
*2 Dedicated software is required for measurement

* Specification subject to change without notice.


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Installation Examples