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Features

JSM-IT300HR  InTouchScope™ Scanning Electron Microscope
The JSM-IT300HR is a new model of JEOL InTouchScope Series.
Equipped with a new high-brightness electron gun and optical system, the JSM-IT300HR achieves superbly high-quality imaging and analysis with high sensitivity and high spatial-resolution.
This new cutting-edge SEM provides superb performance while maintaining high operability building on the award-winning InTouchScope Series.

Superb Performance

High operability: High brightness electron gun for greatly reduced adjustment steps of observation to analysis

  • Even under analytical conditions (working distance 10 mm, probe current 1 nA), the JSM-IT300HR provides a sharp image at a high magnification of x100,000.

    Conventional W-SEM

    A sharp image at x100,000 can be acquired under the observation condition (left), but an image blurs under the analytical condition (right).  

    x100,000 Observation condition (1 pA)
    Specimen: Au particles

    x100,000 Analytical condition (1 nA) 
    Specimen: Au particles

    JSM-IT300HR

    The JSM-IT300HR provides a sharp image even under analytical conditions.
    JSM-IT300HR x100,000 Analytical condition (1 nA)
    x100,000 Analytical condition (1 nA)
    Specimen: Au particles

Observation: Easy observation even at low accelerating voltage and in low vacuum mode

  • Since the JSM-IT300HR provides a high-quality image even at high magnifications of x50,000 to x100,000, fine structures are readily observed.
  • Low-voltage imaging and Low-vacuum mode imaging also enable high-quality image observation, so a beam-sensitive specimen is observed with reduced thermal damage and fine structures of an insulating material are readily observed.
    Specimen: Uncoated Cellulose nano-fibers (CNF)) 
    Low accelerating voltage
     ・Reduced charging
     ・Reduced thermal damage due to beam irradiation
    Specimen: Uncoated Cellulose nano-fibers (CNF)
    Fine structures of each fiber are readily observed with a high magnification even at 1 kV.
    Accelerating voltage: 1kV,  Magnification: x30,000
    High-vacuum mode, Secondary electron image

    Specimen courtesy: Prof. H. Yano and Associate Prof. K. Abe,
    Lab. of Active Bio-based Materials Research Institute for Sustainable Humanosphere,
    Kyoto University

     
    JSM-IT300HR Specimen: Uncoated cross section of optical thin film of blue-light cut glass milled by JIB-4000 Focused Ion Beam System
    Low-vacuum mode and Low accelerating voltage
     ・Reduced charging
     ・Reduced thermal damage due to beam irradiation
     ・High spatial-resolution

    Specimen: Uncoated cross section of optical thin film of blue-light cut glass milled by JIB-4000 Focused Ion Beam System.
    In Low-vacuum mode, an insulated optical thin film is readily observed without conductive coating.
    Accelerating voltage: 3kV,  Magnification: x50,000
    Low-vacuum mode, Backscattered electron composition image

Element analysis: ACL (aperture angle control lens) for smooth element analysis in a sub-micrometer area

  • JSM-IT300HR EDS map

Easier and faster data acquisition

  • ”Smart” touch panel function for intuitive operation is incorporated, which is a feature of InTouchScope Series.
  • Recipes are built in based on specimen category and application. These Recipes automatically set up SEM conditions which are optimized for the observation and analysis of any specimen type.
  • The optional Stage Navigation System greatly facilitates searching of the observation field. A fully embedded CCD camera navigates a color image. When double-clicking on the color image, the stage quickly moves to the observation field.
    JSM-IT300HR Stage Navigation System

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