Electron Probe Microanalyzer (EPMA) List

JXA-8530F Field Emission Electron Probe Microanalyzer

JEOL revolutionized surface analysis with an EPMA featuring a field emission (FE) electron gun, and now is proud to present a new upgraded FE-EPMA. The JXA-8530F operates on PC Windows for data acquisition and analysis while maintaining the powerful hardware of the JXA-8500F including the FE electron gun, EOS, and vacuum system to achieve the ultra micro area analysis. User friendly, PC-based operation facilitate quick and easy analyses at the highest magnifications.

JXA-8230 Electron Probe Microanalyzer

The EDS, which is a versatile and easy-to-use X ray detector, can be mounted. A combined WDS snd EDS system provides a seamless and user-friendly environment for analysis.

Soft X-ray Emission Spectrometer(SXES)

The Soft X-Ray Emission Spectrometer (SXES) is an ultra-high resolution spectrometer consisting of a newly-developed diffraction grating and a high-sensitivity X-ray CCD camera.
In the same way as EDS, parallel detection is possible, and 0.3 eV (Fermi-edge, Al-L standard) ultra-high energy resolution analysis can be performed, surpassing the energy resolution of WDS.

miXcroscopy Linked Optical & Scanning Electron Microscopy System

The same specimen holder can now be used for both the optical microscope and the scanning electron microscope. As a result, by managing the stage information with dedicated software, it is possible for the system to record the locations observed with the optical microscope, and then further magnify the same areas with the scanning electron microscope to observe the fine structures at higher magnification & higher resolution.The observation targets found with the optical microscope can be seamlessly observed with the scanning electron microscope without having to search for the target again. It is now possible to smoothly and easily compare and verify the optical microscope images and scanning electron microscope images.

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