Electron Probe Microanalyzer (EPMA) List
JEOL commercialized the world's first FE-EPMA, the JXA-8500F in 2003. This highly regarded FE-EPMA has long been used in various fields, such as: metals, materials and geology in both industry and academia. The JXA-8530FPlus is a third-generation FE-EPMA that comes with enhanced analytical and imaging capabilities. The In-Lens Schottky field emission electron gun combined with new software provides higher throughput while maintaining high stability, thus allowing a wider range of EPMA applications to be achieved with higher resolution.
The EDS, which is a versatile and easy-to-use X ray detector, can be mounted. A combined WDS snd EDS system provides a seamless and user-friendly environment for analysis.
The Soft X-Ray Emission Spectrometer (SXES) is an ultra-high resolution spectrometer consisting of a newly-developed diffraction grating and a high-sensitivity X-ray CCD camera.
In the same way as EDS, parallel detection is possible, and 0.3 eV (Fermi-edge, Al-L standard) ultra-high energy resolution analysis can be performed, surpassing the energy resolution of WDS.
The same specimen holder can now be used for both the optical microscope and the scanning electron microscope. As a result, by managing the stage information with dedicated software, it is possible for the system to record the locations observed with the optical microscope, and then further magnify the same areas with the scanning electron microscope to observe the fine structures at higher magnification & higher resolution.The observation targets found with the optical microscope can be seamlessly observed with the scanning electron microscope without having to search for the target again. It is now possible to smoothly and easily compare and verify the optical microscope images and scanning electron microscope images.