Electron Probe Microanalyzer (EPMA) List

JXA-8530F Field Emission Electron Probe Microanalyzer

JEOL revolutionized surface analysis with an EPMA featuring a field emission (FE) electron gun, and now is proud to present a new upgraded FE-EPMA. The JXA-8530F operates on PC Windows for data acquisition and analysis while maintaining the powerful hardware of the JXA-8500F including the FE electron gun, EOS, and vacuum system to achieve the ultra micro area analysis. User friendly, PC-based operation facilitate quick and easy analyses at the highest magnifications.

JXA-8230 Electron Probe Microanalyzer

The EDS, which is a versatile and easy-to-use X ray detector, can be mounted. A combined WDS snd EDS system provides a seamless and user-friendly environment for analysis.

Soft X-ray Emission Spectrometer(SXES)

The Soft X-Ray Emission Spectrometer (SXES) is an ultra-high resolution spectrometer consisting of a newly-developed diffraction grating and a high-sensitivity X-ray CCD camera.
In the same way as EDS, parallel detection is possible, and 0.3 eV (Fermi-edge, Al-L standard) ultra-high energy resolution analysis can be performed, surpassing the energy resolution of WDS.

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