MultiBeam System (FIB) List
JIB-4610F is an easy-to-use, out-lens type scanning electron microscope (SEM) equipped with a Schottky electron gun, as well as a new FIB column capable of large current processing (maximum ion current 90nA) installed into one chamber. JIB-4610F enables high-resolution SEM observation after high-speed cross-section milling with FIB, and high-speed analysis with a variety of analytical instruments, such as energy dispersive X-ray spectroscopy (EDS) that takes advantage of the Schottky electron gun delivering a large probe current (200nA), electron back scatter diffraction (EBSD) to perform crystallographic characterization, and cathodoluminescence (CLD). In addition, the 3D analysis function Cut & See is included in the standard configuration, allowing cross-section milling to be executed automatically at fixed intervals, while acquiring SEM images for each cross section.
The JIB-4000 is a focused ion beam processing and observation system (single-beam FIB system) featuring a high-performance ion column. The accelerated Ga ion beam is focused and applied to the sample to enable SIM image observation of the sample surface, milling, and deposition of materials like carbon or tungsten. It is also possible to fabricate cross-section samples in order to observe the sample interior or thin film specimen for TEM imaging. In comparison to a SEM image, a SIM image shows noticeable channeling contrast due to differences in the crystal orientation. It is especially suitable for evaluating cross-sections of multi-layer coatings and metallic structures.