An Auger microprobe is a surface analysis system designed to determine elemental compositions and chemical state in areas a few nm deep from the sample surface by measuring the energy levels of Auger electrons excited by the lectron beam from a sample. The Auger microprobe features high analytical spatial resolution because its analysis area is determined by the size of the focused probe. Most of the recent Auger systems employ a Schottky field emission gun (FEG) for micro area analysis.
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