JSM-7610F Schottky Field Emission Scanning Electron Microscope

 

High resolution imaging and high performance analysis by semi-in-lens objective lens

The JSM-7610F combines two proven technologies – an electron column with semi-in-lens objective lens which can provide high resolution imaging by low accelerating voltage and an in-lens Schottky FEG which can provide stable large probe current – to deliver ultrahigh resolution with wide range of probe currents for all applications (A few pA to more than 200 nA).
The in-lens Schottky FEG is a combination of a Schottky FEG and the first condenser lens and is designed to collect the electrons from the emitter efficiently.
 

The topmost surface imaging at low accelerating voltage by Gentle Beam mode (GB)

The Gentle Beam (GB) mode applies a negative voltage to a specimen and decelerates incident electrons just before they irradiate the specimen, thus the resolution is improved at an extremely low accelerating voltage.
Therefore, 7610F is possible to observe a topmost surface by a few hundred eV which were difficult to observe conventionally and nonconductive samples such as ceramics and semiconductor etc.
 

High throughput and high performance analysis by High Power Optics

The High Power Optics produces fine electron probe for both observation and analysis.
The aperture angle control lens maintains a small probe diameter even at a larger probe current.
Using both techniques, the 7610F is suitable for a wide variety of analysis with EDS, WDS, CL etc
 

Application examples

• High resolution imaging by semi-in-lens objective lens

  Sample: Pt Catalyst Accelerating Voltage 15 kV

  Sample: Carbon Nanotubes Accelerating Voltage 30 kV



• High spatial resolution analysis by semi-in-lens objective lens

  LED cross section (EDS analysis of multilayers below 100 nm)



• The topmost surface imaging at ultra low landing energy by Gentle Beam mode (GB)

  Sample: filter Landing energy 500 eV

  Sample: Mesoporous Silica Landing energy 800 eV