• Features
  • Specifications
  • Application
  • Related Products
  • Information


Soft X-ray Emission Spectrometer(SXES)
The Soft X-Ray Emission Spectrometer (SXES) is an ultra-high resolution spectrometer consisting of a newly-developed diffraction grating and a high-sensitivity X-ray CCD camera.
In the same way as EDS, parallel detection is possible, and 0.3 eV (Fermi-edge, Al-L standard) ultra-high energy resolution analysis can be performed, surpassing the energy resolution of WDS.
External representation


* Click the "replay" button in the box above, and the movie will start(for 4 minutes)

System outline

The newly-developed spectrometer optical system design enables simultaneous measurement of spectra with different energies, without moving the diffraction grating or detector (CCD). With the high energy resolution, chemical state analysis mapping can be performed.

Comparison of SXES, WDS and EDS

Spectra for titanium nitride with various spectrometry methods

For titanium nitride, the peaks of N-Kα and Ti-Ll are overlapped. Even with WDS, and waveform deconvolution using a mathematical method is required. As illustrated in the figure below, there is a high energy resolution with SXES, allowing for TiLl to be observed.

Comparison table

Resolution 0.3 eV
(Fermi edge Al-L)
8 eV (FWHM@Fe-K) 120-130 eV
Chemical bond state analysis Yes Yes (mainly light elements) No
Parallel detection Yes No
(But multiple spectrometers possible)
Spectral elements & detector Diffraction grating+CCD  Analyzing crystal + Proportional counter SDD
Detector cooling Peltier cooling Not needed Peltier cooling
Detection limit
(reference value with B)
20ppm 100ppm 5000ppm

Li-ion battery (LIB) Analysis Example

The example below shows large area maps of LIB samples with different charge states. SXES can map the Li-K peak at both the valence band state (left) and the ground state (middle). A carbon distribution map (right) can also see the function on the LIB that is fully discharged.

Fully-charged, Li-K specimen spectrum

Note: In Li-oxide it is difficult to detect Li-K emission

Light element measurement example

Measurements of carbon compounds using SXES

It is possible to measure the differences between diamond, graphite and polymers. The differences can be observed with the additional peaks from π and σ bonding. As mapping takes a spectra from each pixel, additional maps can be generated for peak shifts of 1 eV and shoulder peaks.

Measurements of various nitrogen compounds

For nitrogen as well, the chemical bonding state can be analyzed from the spectrum peak shape. The peak shapes for nitrates and nitride are completely different, and it is even possible to observe the unique peak shape for ammonium salt, which is very beam sensitive. 


  • Energy resolution 0.3eV(Al-L spectrum measured @73eV)
  • Acquisition energy range: Diffraction grating JS50XL energy region 50-170eV
  • Acquisition energy range: Diffraction grating JS200N energy region 70-210eV
  • Spectrometer chamber mounting points:
    EPMA WDSport: No.2 port (right side from front)
    FE-SEM WDS port (left rear from front)
  • Spectrometer dimensions: W 168mm×D 348mm ×H 683mm 
    * Distance including CCD from the interface
  • Spectrometer mass 25kg

Applicable models

  • EPMA : JXA-8530F, JXA-8230, JXA-8500F, JXA-8200
  • SEM : JSM-7800F, JSM-7800 Prime, JSM-7100F


Related Products


Installation Examples