inelastically scattered electron
inelastically scattered electron
Inelastically scattered electrons are defined as the electrons which lose part of their energy (traveling speed becomes slower) through interactions between the electrons and a specimen. The probability of occurring inelastic scattering is small, ～1/10 or less compared with that of elastic scattering. However, as a specimen is thicker (～10 nm or thicker), the inelastically scattered electrons superposed on elastically scattered electrons obscure a TEM image or a diffraction pattern. To remove inelastically scattered electrons, an energy filter is effectively used.
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