Glossary of TEM Terms

Supervised by

Michiyoshi Tanaka
Professor Emeritus at Tohoku University

Created by



"Glossary of TEM Terms" aims to assist understanding of the basic technical terms of Microscopy, Diffractometry and Spectroscopy of the transmission electron microscope (TEM) field. The glossary contains approximately 800 terms, which have been selected from theoretical, instrumental, crystallographic terms, specimen preparation, image processing, etc., in consideration of recent developments in the TEM field. We have strived for clear and unambiguous descriptions with an easy-to-understand manner using illustrations, TEM images and various spectral data. For the terms that are used also in other scientific fields, we focus the explanations in conformity with TEM. For highly specialized terms, we are very grateful to the professional experts for their cooperation in writing manuscripts, proofreading and data providing.
For further comprehension, references to textbooks or corresponding literatures are recommended. We continue our efforts in enlargement and improvement of the Glossary by adding new terms and enrichment of illustrations, TEM images and spectral data.
We hope that this Glossary of TEM Terms would help better understanding of TEM techniques and its effective use for TEM users.


Masami Terauchi (Professor, Director of Institute of Multidisciplinary Research for Advanced Materials, Tohoku University), Kenji Tsuda (Professor of Frontier Research Institute for Interdisciplinary Sciences, Tohoku University), Koh Saitoh (Professor of Institute of Materials and Systems for Sustainability, Nagoya University) and many other scientists and engineers are also acknowledged.

Note: The affiliations of people who kindly provided data are at the time when the data were provided.

Terms are added or updated

  • September 09, 2021
    update high-resolution electron microscopy
  • September 09, 2021
    update Energy Filter Transmission Electron Microscopy, EFTEM
  • July 21, 2021
    update Köhler Illumination
  • July 21, 2021
    update Exciton
  • May 31, 2021
    update Burgers vector determination of a dislocation using CBED
  • May 31, 2021
    update Debye-Waller factor
  • April 28, 2021
    update grain boundary segregation
  • April 28, 2021
    update Green's function
  • March 08, 2021
    update higher-order Laue zone (HOLZ) reflection
  • March 08, 2021
    update momentum transfer resolved electron energy-loss spectroscopy