Glossary of TEM Terms


Michiyoshi Tanaka
Professor Emeritus at Tohoku University

Co-author for English version



"Glossary of TEM Terms" aims to assist understanding of the basic technical terms of Microscopy, Diffractometry and Spectroscopy of the transmission electron microscope (TEM) field. The glossary consists of approximately 750 terms, which have been selected from theoretical, instrumental, crystallographic terms, specimen preparation, image processing, etc., in consideration of recent developments in the field of TEM. We have strived for clear and unambiguous descriptions with an easy-to-understand manner without using mathematics. For the terms that are used also in other scientific fields, we focus the explanations in conformity with TEM. No use of mathematics might cause a difficulty in understanding the terms in some cases. For further comprehension, reference to textbooks or corresponding literatures is recommended. We have been continuing improvement of the Glossary. We hope this Glossary of TEM Terms helpful for TEM users.


Masami Terauchi (Professor of IMRAM, Tohoku University), Kenji Tsuda (Professor of Frontier Research Institute for Interdisciplinary Sciences, Tohoku University), Koh Saitoh (Professor of Department of Crystalline Materials Science, Graduate school of Engineering, Nagoya University) and Staff of Technical Development Department, EM Business Unit at JEOL Ltd. Many other scientists and engineers are also acknowledged.

Terms are added or updated

  • September 28, 2017
    update pixelated STEM detector
  • September 08, 2017
    update Moire fringe
  • September 08, 2017
    update bend contour (equal inclination fringe)
  • July 25, 2017
    update Si(Li) detector
  • July 25, 2017
    update windowless EDS detector
  • July 25, 2017
    update ultra-thin window (UTW) EDS detector
  • July 25, 2017
    update beryllium window EDS detector
  • July 25, 2017
    update silicon drift detector
  • July 25, 2017
    update semiconductor detector (solid-state detector)
  • June 02, 2017
    update Cs corrector