Glossary of TEM Terms


Michiyoshi Tanaka
Professor Emeritus at Tohoku University

Co-author for English version



"Glossary of TEM Terms" aims to assist understanding of the basic technical terms of Microscopy, Diffractometry and Spectroscopy of the transmission electron microscope (TEM) field. The glossary consists of approximately 750 terms, which have been selected from theoretical, instrumental, crystallographic terms, specimen preparation, image processing, etc., in consideration of recent developments in the field of TEM. We have strived for clear and unambiguous descriptions with an easy-to-understand manner without using mathematics. For the terms that are used also in other scientific fields, we focus the explanations in conformity with TEM. No use of mathematics might cause a difficulty in understanding the terms in some cases. For further comprehension, reference to textbooks or corresponding literatures is recommended. We have been continuing improvement of the Glossary. We hope this Glossary of TEM Terms helpful for TEM users.


Masami Terauchi (Professor of IMRAM, Tohoku University), Kenji Tsuda (Professor of Frontier Research Institute for Interdisciplinary Sciences, Tohoku University), Koh Saitoh (Professor of Department of Crystalline Materials Science, Graduate school of Engineering, Nagoya University) and Staff of Technical Development Department, EM Business Unit at JEOL Ltd. Many other scientists and engineers are also acknowledged.

Note: The affiliations of people who kindly provided data are at the time when the data were provided.

Terms are added or updated

  • June 10, 2019
    update surface plasmon
  • June 10, 2019
    update Autoradiography (Autoradiography in Electron Microscopy)
  • June 10, 2019
    update Reliability factor, R-factor
  • April 18, 2019
    update Born approximation
  • April 18, 2019
    update Young fringe
  • February 14, 2019
    update (L2, L3), (M4, M5)…spectra
  • February 14, 2019
    update core-hole interaction
  • February 14, 2019
    update volume plasmon
  • February 14, 2019
    update Ptychography
  • January 16, 2019
    update tomography