Handbook of Soft X-ray Emission Spectra Version 6.0 (Sep. 2020)

Soft X-ray emission spectroscopy (SXES) is used to probe solid state effects, the energy state of bonding electrons. This spectroscopy has recently combined with modern transmission electron microscopy (TEM), and applied to commercial electron probe microanalysis (EPMA)/scanning electron microscopy (SEM). Since there are many atomic resonances in soft X-ray energy region (< several keV), SXES combined with electron microscopy provides a sensitive tool for elemental and chemical identification method based on microscopy, which can make many application opportunities.

Masami Terauchi1), Hideyuki Takahashi2), Masaru Takakura2), Takanori Murano2) and Shogo Koshiya2)
IMRAM, Tohoku University1) and JEOL Ltd.2)

English site is here

Contents

P1 Introduction
P3 Characteristics of SXES
P5 X-ray Emission process
P7 Rules for X-ray emission
P10 Comparison of experiment and calculation
P11 Development of commercial SXES system
P12 Extend to higher energy region
P14 Information of L-emissions of 3d transition metal elements
P16 Anisotropic soft X-ray emission
P18 Part 1 : SXE spectra obtained by reference materials
P52 Part 2 : SXE survey spectra obtained by each reference material
P242 Part 3 : Application data using SXES
P260 Reference: Related documents of electron-beam induced SXES
P266 Electron configuration and index

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