Handbook of Soft X-ray Emission Spectra Version 9.0
(May 2025)

Soft Xray emission spectroscopy (SXES) can probe solid state effect (chemical bonding state) of material by analyzing low-energy X-rays from extreme ultraviolet (EUV) to soft X-ray energy regions.

This spectroscopy has been combined with modern transmission electron microscopy (TEM), and applied to commercial electron probe microanalysis (EPMA) / scanning electron microscopy (SEM). Since there are many atomic resonances in soft X-ray energy region (≤ 8 keV), SXES combined with electron microscopy provides a sensitive tool for elemental and chemical identification based on microscopic observation, which can make many application opportunities.

The aim of this booklet is to provide basic knowledge of soft X-ray emission spectroscopy and reference spectra for commercially available materials.

Masami Terauchi¹⁾, Masato Koike¹⁾, Hideyuki Takahashi²⁾, Masaru Takakura²⁾, Takanori Murano²⁾ and Shogo Koshiya²⁾
IMRAM, Tohoku University¹⁾ and JEOL Ltd.²⁾

English site is here

Handbook of Soft X-ray Emission spectra Version 9.0の解説と応用データ部分の和訳を基本として、補足的な説明や実験上の注意点等を追加した「電子線励起 軟X線発光分光 入門」を公開しています。