Handbook of Soft X-ray Emission Spectra Version 6.0 (Sep. 2020)
Soft X-ray emission spectroscopy (SXES) is used to probe solid state effects, the energy state of bonding electrons. This spectroscopy has recently combined with modern transmission electron microscopy (TEM), and applied to commercial electron probe microanalysis (EPMA)/scanning electron microscopy (SEM). Since there are many atomic resonances in soft X-ray energy region (< several keV), SXES combined with electron microscopy provides a sensitive tool for elemental and chemical identification method based on microscopy, which can make many application opportunities.
Masami Terauchi1), Hideyuki Takahashi2), Masaru Takakura2), Takanori Murano2) and Shogo Koshiya2)
IMRAM, Tohoku University1) and JEOL Ltd.2)
Contents
| P1 | Introduction |
| P3 | Characteristics of SXES |
| P5 | X-ray Emission process |
| P7 | Rules for X-ray emission |
| P10 | Comparison of experiment and calculation |
| P11 | Development of commercial SXES system |
| P12 | Extend to higher energy region |
| P14 | Information of L-emissions of 3d transition metal elements |
| P16 | Anisotropic soft X-ray emission |
| P18 | Part 1 : SXE spectra obtained by reference materials |
| P52 | Part 2 : SXE survey spectra obtained by each reference material |
| P242 | Part 3 : Application data using SXES |
| P260 | Reference: Related documents of electron-beam induced SXES |
| P266 | Electron configuration and index |
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