トポグラフィー

topography

原義は地形図のこと。3次元の形状データを表すグラフィック法。　反射電子像で分割検出器を使って試料表面の凹凸を観察する像のことをトポ像という。トポグラフという言葉はX線トポグラフとして使われることが多い。X線の場合はレンズが無いので、試料位置と回折強度との間に1対1の対応をつけて格子欠陥、格子歪み、不純物、分域などの2次元的分布を得る方法をX線トポグラフと呼ぶ（電子顕微鏡ではSTEM法がこれに対応する）。明視野、暗視野像は一種のトポグラフである。

A graphic method that shows three-dimensional configurational data. A backscattered electron image providing a topographic map of a specimen surface, which is obtained with the use of a two-segment detector is called a TOPO image. The term, "topograph," is used as X-ray topograph. Since a lens does not exist for X-rays in a usual sense, the two-dimensional distributions of lattice defects, lattice distortions, impurities, domains, etc., are obtained by taking one-to-one correspondence between the specimen position and diffraction intensity from the position. The obtained image is called an X-ray topograph. (In a TEM, STEM corresponds to this method.) The bright-field/dark-field image can be regarded as a kind of topograph.