分析電子顕微鏡法

analytical electron microscopy, AEM

[目次：分光分析(EELS／EDS／電子構造)]

透過電子顕微鏡にEDS、EELSなどの分析機能を付加し、TEM観察した場所の微小領域の元素の定性/定量分析や電子状態の分析を行なう方法。

A microscopy method that adds analytical functions, such as EDS and EELS to a TEM, in order to perform qualitative and quantitative analysis of elements and/or electronic structure analysis from micro- or nano-areas subjected to TEM observation.

関連用語から探す