ベーク装置

bakeout device

[目次：真空系]

透過電子顕微鏡の真空を高真空に保つために、電界放出型電子銃室、鏡筒内壁や試料ステージを焼きだす加熱装置。

A device that bakes out vacuum chambers, such as the FEG chamber, the inside walls of the microscope column and the specimen stage, to obtain a high vacuum in a TEM.

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