分解能

resolving power

[目次：理論]

この用語は、二次電子像や反射電子像の形態観察では、空間分解能 (判別可能な2点間の最小距離) を意味し、エネルギー分散型X線分光器 (EDS) や波長分散型X線分光器 (WDS) によるX線分光では、エネルギー分解能 (スペクトルの判別可能な最小エネルギー) を意味してきた。
しかし、近年、SEMの空間分解能の表示に、像のシャープネスを数値化するという新しい手法が導入されつつある。

The term of "resolution" of the secondary electron image or the backscattered electron image for morphological observation has meant the spatial resolution, that is, the minimum distance between two adjacent points at which these points appear to be distinguished. In the case of X-ray spectroscopy using the energy dispersive X-ray spectrometer (EDS) or the wavelength dispersive X-ray spectrometer (WDS), the resolution has meant the energy resolution, that is, the minimum energy of a spectral peak that can be resolved.
However recently for the definition of the SEM spatial resolution, a new approach by which the sharpness of the image is converted into a numeral, has been gradually introduced.