検出立体角

solid angle

[目次：分光分析(EELS／EDS／電子構造)]

EDSにおいて、試料から放出される特性X線を、検出器が試料を見込む立体角度のこと。検出立体角は、検出器の有効検出断面積が大きく、試料と検出器の距離が短いほど大きくとることができる。

"Solid angle" for detection of EDS signals is a three-dimensional angle formed by the cross-sectional detection area (sphere) of the detector with respect to the incidence point of the electron beam on the specimen from which characteristic X-rays are emitted. The solid angle can be made larger for a larger detection area and a smaller distance between the specimen and the detector.

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