真空蒸着装置

vacuum evaporator

[目次：試料等(試料および試料作製)]

真空に排気したチャンバーの中に、物質（金属の場合が大半）を蒸発させるための発熱体と容器、物質層を付着させる固体(基板)を置き、容器に入れた物質を高温融解して蒸発させ薄膜を形成する装置。透過電子顕微鏡用の試料作製には、タングステン線やタンタル板などの発熱体を抵抗過熱して物質を蒸発させる。

A "vacuum evaporator" is an instrument to form a thin substance layer on a surface of a substrate by vacuum evaporation (deposition). The vacuum evaporator consists of a heating element, a case and a substrate in a vacuum chamber. A substance (in most cases, a metal) that is placed in the case is evaporated by melting at high temperature, and a thin film (layer) is formed on the substrate. In specimen preparation for a TEM, a heating element, such as a tungsten (W) wire or a tantalum (Ta) plate, is resistively-heated and the substance is evaporated (deposited).

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