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超高真空

超高真空

ultra-high vacuum

[目次:真空系]

10-5Pa以下の高真空のこと。超高真空を実現するには、ポンプ/容器に用いる材料の選択をはじめ高い技術が必要。

A high vacuum of 10-5 Pa or better. To achieve an "ultra-high vacuum," high-end technology is required, which includes selection of appropriate materials of pumps, containers, etc.