特性X線

characteristic X-ray

[目次：分光分析(EELS／EDS／電子構造)]

内殻電子の1つが励起して生じた空孔に、より高いエネルギー準位にある外殻電子が落ちる際、そのエネルギー差に対応するX線が放出される。これが特性X線であり、そのエネルギーは元素に固有である。これを用いて微小領域の定性定量元素分析を行なう。

When one of inner-shell electrons is excited, an electron vacancy is formed in the inner-shell states. Then, an outer-shell electron, whose energy level is higher than that of the inner-shell electron, falls on the vacancy while emitting X-rays. The energy of the emitted X-rays corresponds to the energy difference between the outer-shell electron and the inner-shell electron. The emitted X-rays are called "characteristic X-ray(s)" and are characteristic of individual atoms. The characteristic X-rays are utilized for qualitative and quantitative element analysis on a micro-area.

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