非弾性散乱電子

inelastically scattered electron

[目次：理論(電子の散乱／回折／結像)]

入射電子が試料を構成する原子に衝突するとき、電子や結晶格子と相互作用をしてそのエネルギーを一部失って（速度が遅くなる）散乱される電子。非弾性散乱が起こる確率は弾性散乱に比べて一桁以上小さいが、試料が厚くなると（～10nm以上）、非弾性散乱電子の寄与が弾性散乱に重なるために、TEM像や電子回折図形が不明瞭になる。非弾性散乱を取り除くには、エネルギーフィルタを搭載した透過電子顕微鏡が使われる。

Inelastically scattered electrons are defined as the electrons which lose part of their energy (traveling speed becomes slower) through interactions between the electrons and a specimen. The probability of occurring inelastic scattering is small, ～1/10 or less compared with that of elastic scattering. However, as a specimen is thicker (～10 nm or thicker), the inelastically scattered electrons superposed on elastically scattered electrons obscure a TEM image or a diffraction pattern. To remove inelastically scattered electrons, an energy filter is effectively used.

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