ホローコーン照射

hollow-cone beam illumination

[目次：レンズ系]

電子線を光軸に対して1段目の偏向コイルである角度傾斜させ、2段目の偏向コイルで試料の同じ場所を照射するように振り戻し、さらに電子線を光軸に対して回転させながら試料に照射する照射法。明視野、暗視野に現れる回折コントラストを消すためや、収束電子回折で強いZOLZ反射の強度なしにHOLZ反射の作る対称性を観察するのに使われる。

A beam illumination method by which a cone-shaped electron beam is produced. In the method, the beam is tilted to a certain angle against the optical axis by the first-stage deflection coils and is tilted back by the second-stage deflection coils to illuminate the same position on the specimen, and then the beam is rotated with respect to the optical axis kept the same illumination position. The method is used to wipe out diffraction contrast in the bright- and dark-field images and to observe the symmetries produced only by HOLZ lines without strong intensity due to ZOLZ interaction in the CBED pattern.

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