焼きだし（鏡筒内壁などの）

baking

[目次：真空系]

透過電子顕微鏡の真空を高真空に保つために、電界放出型電子銃室、鏡筒内壁や試料ステージを真空状態で加熱すること。吸蔵されているガスを強制的に脱ガスし、その後のガス放出を少なくさせる。電界放出型電子銃の場合は電子銃の安定な作動、長寿命、放電損傷の減少などの目的で～300℃の高温で40時間以上の焼き出しを行う。鏡筒等の場合はOリングを使っているので、高温での焼き出しはできないので～60℃で3日間くらいの焼きだしを行う。

"Baking" is to heat vacuum chambers under a vacuum state, such as the FEG chamber, the inside walls of the microscope column and the specimen stage, to obtain a high vacuum in a TEM. Baking accelerates degas from the vacuum chambers and decreases subsequent outgas. When a TEM equipped with an FEG is used, baking of the FEG chamber is performed for more than 40 h at a high temperature of ～300 ℃ so that stable operation and long lifetime (operating time) of the FEG are achieved and also discharge damage to the FEG is decreased. When the column and stage which use O-rings are baked, the baking is carried out for about 3 days at ～60 ℃ because these parts cannot be baked at a high temperature.