予備排気

pre-evacuation

[目次：真空系]

試料ホルダの予備排気室を大気圧から一定の低圧力まで排気することをいう。試料予備排気室を大気にして試料を装着し、予備排気した後、仕切り弁を開けて試料を試料室に移動する。

"Pre-evacuation" is to evacuate the pre-evacuation chamber for the specimen holder from atmospheric pressure to a certain low pressure. In the pre-evacuation process, first the specimen pre-evacuation chamber is vented and a specimen is loaded on the specimen holder, and next the chamber is pre-evacuated, and finally the isolation valve is opened and the specimen is transferred to the specimen chamber.